Tag: plasma
Halogen-free plasma technique achieves atomic-level etching of hafnium oxide for next-gen semiconductors
A facile anisotropic atomic-layer etching course of for HfO2 movies at room temperature with out utilizing halogen-based chemical…
Applying plasma technology for more effective lithium extraction
Plasma Lithium Mineral Carnobation Gadget. Credit score: Korea Institute of Fusion Power (KFE) Latest analysis suggests an improved…